| Location/Device |
Model Parameters ( ) |
Reference Detector |
| Device-Specific Fit |
Generic (from sibling devices) |
| Si |
SiO2 |
Si3N4 |
Depletion Depth |
CS Si |
CS SiO |
CS Width |
| I0/w203c4r |
0.297 |
0.350 |
0.022 |
65 |
0.35 |
0.45 |
4.1 |
w190c3 |
| I1/w193c2 |
0.292 |
0.339 |
0.024 |
65 |
0.35 |
0.45 |
4.1 |
w103c4 |
| I2/w158c4r |
0.272 |
0.319 |
0.030 |
65 |
0.35 |
0.45 |
4.1 |
w103c4 |
| I3/w215c2r |
0.291 |
0.344 |
0.020 |
65 |
0.35 |
0.45 |
4.1 |
w190c3 |
| S0/w168c4r |
0.264 |
0.318 |
0.024 |
64 |
0.35 |
0.45 |
4.1 |
w190c3 |
| S1/w140c4r |
0.0001 |
0.023 |
N/A |
30 |
N/A |
N/A |
N/A |
w134c4r, w103c4 |
| S2/w182c4r |
0.270 |
0.231 |
0.030 |
76 |
0.35 |
0.45 |
4.1 |
w103c4 |
| S3/w134c4r |
0.0001 |
0.023 |
N/A |
40 |
N/A |
N/A |
N/A |
w203c2, w103c4 |
| S4/w457c4 |
0.244 |
0.314 |
0.042 |
72 |
0.35 |
0.45 |
4.1 |
w190c3 |
| S5/w203c4r |
0.289 |
0.339 |
0.021 |
72 |
0.35 |
0.45 |
4.1 |
w190c3 |
| 1-parameter 90% conf. limits for |
|
|
|
|
|
|
|
|
| FI Devices: |
 |
 |
 |
 |
fixed |
fixed |
fixed |
|
| BI Devices: |
fixed |
fixed |
N/A |
 |
fixed |
fixed |
fixed |
|
:
typical one-parameter 90 % confidence range from mesh experiments is . |
:
typical one-parameter 90 % confidence range from mesh experiments is . |
:
typical one-parameter 90 % confidence range from mesh experiments is . |
:
Deadlayer model parameters for BI devices fixed at approximate values;
see text. |